The PL-022, PL-033, and PL-055 PICMA(tm) Chip monolithic, multiplayer,
piezo actuators from PI, Auburn, MA, consist of a ceramic-insulated
PZT block made of 30 (m layers. Claimed by PI to be the smallest
multiplayer piezo actuators in the world, the PICMA Chip line provides
sub-nanometer resolution and sub-millisecond response, and feature
solderable terminations. They are available in sizes as small as
2 x 2 x 2 mm3. The actuators are made from a ceramic material in
which the piezoceramic properties such as stiffness, capacitance,
displacement, temperature stability, and leakage current are combined.
They feature a usable temperature range to 150(C, and down to a
few Kelvin. Diffusion of water molecules into the insulation layer
is reduced by the use of cofired outer ceramic insulation. They
produce no measurable outgassing and are compatible with ultra-high-vacuum
conditions.
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